L. Trabzon And O. Awadelkarim, "Changes in material properties of low-k interlayer dielectric polymers induced by exposure to plasmas," MICROELECTRONIC ENGINEERING , vol.65, no.4, pp.463-477, 2003
Trabzon, L. And Awadelkarim, O. 2003. Changes in material properties of low-k interlayer dielectric polymers induced by exposure to plasmas. MICROELECTRONIC ENGINEERING , vol.65, no.4 , 463-477.
Trabzon, L., & Awadelkarim, O., (2003). Changes in material properties of low-k interlayer dielectric polymers induced by exposure to plasmas. MICROELECTRONIC ENGINEERING , vol.65, no.4, 463-477.
Trabzon, L, And OO Awadelkarim. "Changes in material properties of low-k interlayer dielectric polymers induced by exposure to plasmas," MICROELECTRONIC ENGINEERING , vol.65, no.4, 463-477, 2003
Trabzon, L And Awadelkarim, OO. "Changes in material properties of low-k interlayer dielectric polymers induced by exposure to plasmas." MICROELECTRONIC ENGINEERING , vol.65, no.4, pp.463-477, 2003
Trabzon, L. And Awadelkarim, O. (2003) . "Changes in material properties of low-k interlayer dielectric polymers induced by exposure to plasmas." MICROELECTRONIC ENGINEERING , vol.65, no.4, pp.463-477.
@article{article, author={L Trabzon And author={OO Awadelkarim}, title={Changes in material properties of low-k interlayer dielectric polymers induced by exposure to plasmas}, journal={MICROELECTRONIC ENGINEERING}, year=2003, pages={463-477} }