P. Rao And Ö. F. BEYCA, "Heterogeneous Wireless Sensing and Modeling of Chemical Mechanical Planarization Process for Microelectronic Applications," CMP Back End Processes Review, Univ. of North Texas, 2010 , 2010
Rao, P. And BEYCA, Ö. F. 2010. Heterogeneous Wireless Sensing and Modeling of Chemical Mechanical Planarization Process for Microelectronic Applications. CMP Back End Processes Review, Univ. of North Texas, 2010 .
Rao, P., & BEYCA, Ö. F., (2010). Heterogeneous Wireless Sensing and Modeling of Chemical Mechanical Planarization Process for Microelectronic Applications . CMP Back End Processes Review, Univ. of North Texas, 2010
Rao, Prahalad, And Ömer Faruk Beyca. "Heterogeneous Wireless Sensing and Modeling of Chemical Mechanical Planarization Process for Microelectronic Applications," CMP Back End Processes Review, Univ. of North Texas, 2010, 2010
Rao, Prahalad And BEYCA, Ömer F. . "Heterogeneous Wireless Sensing and Modeling of Chemical Mechanical Planarization Process for Microelectronic Applications." CMP Back End Processes Review, Univ. of North Texas, 2010 , 2010
Rao, P. And BEYCA, Ö. F. (2010) . "Heterogeneous Wireless Sensing and Modeling of Chemical Mechanical Planarization Process for Microelectronic Applications." CMP Back End Processes Review, Univ. of North Texas, 2010 .
@conferencepaper{conferencepaper, author={Prahalad Rao And author={Ömer Faruk Beyca}, title={Heterogeneous Wireless Sensing and Modeling of Chemical Mechanical Planarization Process for Microelectronic Applications}, congress name={CMP Back End Processes Review, Univ. of North Texas, 2010}, city={}, country={}, year={2010}}