L. Trabzon And O. Awadelkarim, "Changes in materials properties of low k interlayer dielectiric polymers induced by exposure to plasma," MICROELECTRONIC ENGINEERING , vol.65, no.4, pp.463-477, 2003
Trabzon, L. And Awadelkarim, O. 2003. Changes in materials properties of low k interlayer dielectiric polymers induced by exposure to plasma. MICROELECTRONIC ENGINEERING , vol.65, no.4 , 463-477.
Trabzon, L., & Awadelkarim, O., (2003). Changes in materials properties of low k interlayer dielectiric polymers induced by exposure to plasma. MICROELECTRONIC ENGINEERING , vol.65, no.4, 463-477.
Trabzon, Levent, And Osama Awadelkarim. "Changes in materials properties of low k interlayer dielectiric polymers induced by exposure to plasma," MICROELECTRONIC ENGINEERING , vol.65, no.4, 463-477, 2003
Trabzon, Levent And Awadelkarim, Osama. "Changes in materials properties of low k interlayer dielectiric polymers induced by exposure to plasma." MICROELECTRONIC ENGINEERING , vol.65, no.4, pp.463-477, 2003
Trabzon, L. And Awadelkarim, O. (2003) . "Changes in materials properties of low k interlayer dielectiric polymers induced by exposure to plasma." MICROELECTRONIC ENGINEERING , vol.65, no.4, pp.463-477.
@article{article, author={Levent Trabzon And author={Osama Awadelkarim}, title={Changes in materials properties of low k interlayer dielectiric polymers induced by exposure to plasma}, journal={MICROELECTRONIC ENGINEERING}, year=2003, pages={463-477} }