V. V. VASYLIEV Et Al. , "Experimental and modeling study on the role of Ar addition to the working gas on the development of intrinsic stress in TiN coatings produced by filtered vacuum-arc plasma," THIN SOLID FILMS , vol.642, pp.207-213, 2017
VASYLIEV, V. V. Et Al. 2017. Experimental and modeling study on the role of Ar addition to the working gas on the development of intrinsic stress in TiN coatings produced by filtered vacuum-arc plasma. THIN SOLID FILMS , vol.642 , 207-213.
VASYLIEV, V. V., KALINICHENKO, A. I., RESHETNYAK, E. N., AZAR, G. T. P., Ürgen, M. K., & STREL'NITSKIJ, V. E., (2017). Experimental and modeling study on the role of Ar addition to the working gas on the development of intrinsic stress in TiN coatings produced by filtered vacuum-arc plasma. THIN SOLID FILMS , vol.642, 207-213.
VASYLIEV, V. Et Al. "Experimental and modeling study on the role of Ar addition to the working gas on the development of intrinsic stress in TiN coatings produced by filtered vacuum-arc plasma," THIN SOLID FILMS , vol.642, 207-213, 2017
VASYLIEV, V. V. Et Al. "Experimental and modeling study on the role of Ar addition to the working gas on the development of intrinsic stress in TiN coatings produced by filtered vacuum-arc plasma." THIN SOLID FILMS , vol.642, pp.207-213, 2017
VASYLIEV, V. V. Et Al. (2017) . "Experimental and modeling study on the role of Ar addition to the working gas on the development of intrinsic stress in TiN coatings produced by filtered vacuum-arc plasma." THIN SOLID FILMS , vol.642, pp.207-213.
@article{article, author={V. V. VASYLIEV Et Al. }, title={Experimental and modeling study on the role of Ar addition to the working gas on the development of intrinsic stress in TiN coatings produced by filtered vacuum-arc plasma}, journal={THIN SOLID FILMS}, year=2017, pages={207-213} }