The Role of Superimposing Pulse Bias Voltage on DC Bias on the Macroparticle Distribution and Structure of TiAlN Coatings Produced with CA-PVD

Taghavi Pourian Azar G., Er D., ÜRGEN M. K.

International Thin Films Conference (TACT 2017), 15 - 18 Ekim 2017

  • Yayın Türü: Bildiri / Özet Bildiri
  • İstanbul Teknik Üniversitesi Adresli: Evet