The Role of Superimposing Pulse Bias Voltage on DC Bias on the Macroparticle Distribution and Structure of TiAlN Coatings Produced with CA-PVD

Taghavi Pourian Azar G., Er D., ÜRGEN M. K.

International Thin Films Conference (TACT 2017), 15 - 18 October 2017

  • Publication Type: Conference Paper / Summary Text
  • Istanbul Technical University Affiliated: Yes