Crystallization of TiO2 on sputter deposited amorphous titanium thin films


Tepe S. A., Danışman M., CANSEVER N.

Materials Chemistry and Physics, cilt.282, 2022 (SCI-Expanded) identifier identifier

  • Yayın Türü: Makale / Tam Makale
  • Cilt numarası: 282
  • Basım Tarihi: 2022
  • Doi Numarası: 10.1016/j.matchemphys.2022.125965
  • Dergi Adı: Materials Chemistry and Physics
  • Derginin Tarandığı İndeksler: Science Citation Index Expanded (SCI-EXPANDED), Scopus, Academic Search Premier, Aerospace Database, Chemical Abstracts Core, Communication Abstracts, INSPEC, Metadex, Civil Engineering Abstracts
  • Anahtar Kelimeler: Amorphous titanium, Thin films, Anodization, Impedance spectroscopy
  • İstanbul Teknik Üniversitesi Adresli: Evet

Özet

© 2022 Elsevier B.V.Titanium and titanium dioxide are both very well-known and commonly used materials in today's world. They would also be very promising materials for years to come as their more novel properties are continued to be investigated. For meeting the demands of today's technology and to fine tune its properties, titanium dioxide is still in the scope of scientists from different branches of science. In our study, sputter deposited amorphous titanium thin films on glass substrates were anodically oxidized at 0.7 V for 250, 750, 1250 s in 0.5 M H2SO4 solution to observe their crystalline structure and electrochemical properties. X ray diffraction analysis revealed rutile and anatase crystalline peaks on 250 s and 1250 s anodized samples. Additionally, electrochemical impedance spectroscopy and atomic force microscopy analysis were carried out for investigating the effect of anodization on electrochemical and surface properties of amorphous titanium thin films. Both analysis showed compressive stress related findings in oxide films due to crystallization process.