Optical and Tribological Properties of Silicon Carbide Thin Films Grown by Reactive DC Magnetron Sputtering

Tavsanoglu T., BASKURT E., Yücel O.

4th International Symposium on Advanced Ceramics (ISAC-4), Osaka, Japan, 14 - 18 November 2010, vol.484, pp.145-151 identifier identifier

  • Publication Type: Conference Paper / Full Text
  • Volume: 484
  • Doi Number: 10.4028/www.scientific.net/kem.484.145
  • City: Osaka
  • Country: Japan
  • Page Numbers: pp.145-151
  • Istanbul Technical University Affiliated: Yes


In this study, SiC films were deposited by reactive DC magnetron sputtering of high purity (99.999%) Si target in Ar/CH4 gas mixture. Three types of substrates, AISI M2 grade high speed steel, glass, and Si (100) were used in each deposition. Films were grown with different compositions at 50 degrees C and 250 degrees C by varying (0-50 %) CH4/Ar processing gas ratios. Microstructural properties of SiC films were characterized by cross-sectional FE-SEM (Field-Emission Scanning Electron Microscope) observations. XRD (X-Ray Diffractometer) results indicated that films were amorphous. Friction coefficients as low as 0.1 were obtained from SIC coatings against Al2O3 balls, according to the tribological tests. Optical investigations showed that the transparency and opacity of SIC films could easily be tailored by modifying Si and C concentrations in the coatings.