DEVELOPMENT OF A MEASUREMENT TECHNIQUE FOR HIGHLY CONDUCTIVE CVD DIAMONDS AND ANALYSIS OF UNCERTANTIES DUE TO 3D HEAT LOSSES


ARIK M., LI R., ANDREINI K., CROSBY J., SHADDOCK D., Kızıl H.

12th Intersociety Conference on Thermal and Thermomechanical Phenomena in Electronic Systems (ITherm), Nevada, Amerika Birleşik Devletleri, 2 - 05 Haziran 2010 identifier identifier

Özet

Thermal spreaders have been of interest over the last few decades. Heat pipes, Thermal Pyrolytic Graphite (TPG), and other graphite-based materials have been commonly used for enhancing the thermal performance. This study will start for a discussion of Chemical Vapor Deposition (CVD) of diamond manufacturing to enable high conductivity plates for heat spreading. Later attention will be turned to absolute thermal conductivity measurements. A measurement technique for the thermal conductivity of a thin diamond plate was proposed. Baseline measurements have been established via a similar copper plate with a thermal conductivity of 400 W/m-K. IR thermal images were collected. Heat losses are calculated via analytical and numerical models. We found that one type of thermal management CVD diamond has a thermal conductivity of approximately 820 W/m-K accounting both diamond film and thin Silicon substrate.