Development of Through Silicon via contacts for front side electrodes in ISFET sensors | AVESİS

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Development of Through Silicon via contacts for front side electrodes in ISFET sensors

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ERTEN A. C., Park S., Briggs E., Martin D., Takeshita Y., Martz T., ...More

AVS 60th International Symposium and Exhibition, United States Of America, 27 October 2013

Publication Type: Conference Paper / Summary Text
Country: United States Of America
Istanbul Technical University Affiliated: Yes