Development of Through Silicon via contacts for front side electrodes in ISFET sensors

ERTEN A. C., Park S., Briggs E., Martin D., Takeshita Y., Martz T., ...More

AVS 60th International Symposium and Exhibition, United States Of America, 27 October 2013

  • Publication Type: Conference Paper / Summary Text
  • Country: United States Of America
  • Istanbul Technical University Affiliated: Yes