2nd International Symposium on Functional Diversification of Semiconductor Electronics (More-Than-Moore) held during the 225th meeting of The-Electrochemical-Society, Florida, Amerika Birleşik Devletleri, 11 - 15 Mayıs 2014, cilt.61, ss.65-69
High frequency ultrasonic imaging devices are widely used in minimally invasive catheter-based interventions especially in intravascular imaging, but there is still a need for more flexible devices with true 3-D volumetric imaging capability in front of the catheter tip. Single chip capacitive micromachined ultrasonic transducer (CMUT) arrays with on-chip CMOS electronics implementation provides great flexibility in designing array geometry and integrated front-end electronics. We have successfully implemented dual ring CMUT arrays for forward-looking intravascular ultrasound (IVUS) and intracardiac echography (ICE) imaging which provide 3-D volumetric imaging functionality. In this paper, we report on the details of the single-chip microscale imaging system and experimental results. We also discuss system improvements with initial experimental results.