IEEE International Symposium on Industrial Electronics (ISIE), Bari, Italy, 4 - 07 July 2010, pp.415-421
This study presents the design and simulation based comparison of two chattering-free SMC approaches for the position control of MEM microactuators The obtained results are benchmarked against a previously published chattering free SMC study, also for the control of micromirrors. Although crucial for increased reliability in MEM actuators, chattering free SM based controllers are rare in this area. The proposed chattering free SMCs proposed and tested in this study .provide a faster settling time as well as increased reliability, which are both critical performance criteria for the control of micromirrors.