Improvement of gas sensing performance of TiO2 towards NO2 by nano-tubular structuring

Goenuellue Y., RODRIGUEZ G. C. M., SARUHAN B., Urgen M. K.

SENSORS AND ACTUATORS B-CHEMICAL, vol.169, pp.151-160, 2012 (SCI-Expanded) identifier identifier

  • Publication Type: Article / Article
  • Volume: 169
  • Publication Date: 2012
  • Doi Number: 10.1016/j.snb.2012.04.050
  • Journal Indexes: Science Citation Index Expanded (SCI-EXPANDED), Scopus
  • Page Numbers: pp.151-160
  • Istanbul Technical University Affiliated: Yes


Aligned nano-tubular TiO2 layers were synthesised and their gas sensing abilities were compared to those of magnetron sputtered titania films towards NO2 and CO. TiO2 nano-tubes were grown on the titanium foils, via anodic oxidation method (hereafter anodisation) using of fluoride containing ethylene glycol (EG)-based electrolytes. Both amorphous, nano-tubular titania structures and magnetron sputtered titania layers were annealed at 450 and 700 degrees C. Magnetron-sputtered titania films were anatase on deposition and converted to rutile on heat-treatment in air for 3 h at 800 degrees C. Nano-tubular titania layers were converted to anatase at about 400 degrees C and above 600 degrees C to rutile. The sensor performance of the nano-tubular TiO2 layers annealed at 450 degrees C (anatase) and at 700 degrees C (anatase and rutile) was investigated at 300-500 degrees C towards NO2 concentrations of 10. 25, 50 and 100 ppm and CO concentrations of 25,50 and 75 ppm and compared to those of the magnetron sputtered TiO2-layers annealed at 450 degrees C (anatase) and 800 degrees C (rutile and anatase). The nano-tubular TiO2-sensor layers yield very promising results for sensing NO2 with some cross-sensitivity towards CO in relatively small concentrations and in a wide concentration range up to 500 degrees C. (C) 2012 Elsevier B.V. All rights reserved.