Design considerations of a MEMS cantilever beamswitch for pull in under electrostatic force generated by means of vibrations


İkizoğlu S. , Ayşe Özgül E.

JVE International Ltd. Journal of Vibroengineering, vol.0, 2014 (Journal Indexed in SCI Expanded)

  • Publication Type: Article / Article
  • Volume: 0
  • Publication Date: 2014
  • Title of Journal : JVE International Ltd. Journal of Vibroengineering