Design considerations of a MEMS cantilever beamswitch for pull in under electrostatic force generated by means of vibrations | AVESİS

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Design considerations of a MEMS cantilever beamswitch for pull in under electrostatic force generated by means of vibrations

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İkizoğlu S. , Ayşe Özgül E.

JVE International Ltd. Journal of Vibroengineering, vol.0, 2014 (Journal Indexed in SCI Expanded)

Publication Type: Article / Article
Volume: 0
Publication Date: 2014
Title of Journal : JVE International Ltd. Journal of Vibroengineering