Design considerations of a MEMS cantilever beamswitch for pull in under electrostatic force generated by means of vibrations

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İkizoğlu S., Ayşe Özgül E.

JVE International Ltd. Journal of Vibroengineering, vol.0, 2014 (SCI-Expanded)

• Publication Type: Article / Article
• Volume: 0
• Publication Date: 2014
• Journal Name: JVE International Ltd. Journal of Vibroengineering
• Journal Indexes: Science Citation Index Expanded (SCI-EXPANDED)
• Istanbul Technical University Affiliated: Yes