Design considerations of a MEMS cantilever beamswitch for pull in under electrostatic force generated by means of vibrations


İkizoğlu S. , Ayşe Özgül E.

JVE International Ltd. Journal of Vibroengineering, cilt.0, 2014 (SCI Expanded İndekslerine Giren Dergi)

  • Cilt numarası: 0
  • Basım Tarihi: 2014
  • Dergi Adı: JVE International Ltd. Journal of Vibroengineering