On Chip RF Passives using an Su-8 composite with magnetic nanoparticles

Sagkol H., Korkmaz E., Kebe M., Mehmedi Z.

66th IEEE Electronic Components and Technology Conference (ECTC), Nevada, Amerika Birleşik Devletleri, 31 Mayıs - 03 Haziran 2016, ss.1862-1866 identifier identifier

  • Yayın Türü: Bildiri / Tam Metin Bildiri
  • Doi Numarası: 10.1109/ectc.2016.389
  • Basıldığı Şehir: Nevada
  • Basıldığı Ülke: Amerika Birleşik Devletleri
  • Sayfa Sayıları: ss.1862-1866
  • İstanbul Teknik Üniversitesi Adresli: Evet

Özet

A novel process employing a mixture of Su-8 negative photoresist and surfactant coated magnetic nanoparticles is demonstrated. Magnetic nanoparticles increase the permeability of Su-8. Coplanar waveguide samples are fabricated by using of nanoparticles with associated fabrication process and characterized. Magnetic composite material results demonstrated a higher propagation constant without any visible eddy current losses that are generally associated with high permeability materials.