On Chip RF Passives using an Su-8 composite with magnetic nanoparticles

Sagkol H., Korkmaz E., Kebe M., Mehmedi Z.

66th IEEE Electronic Components and Technology Conference (ECTC), Nevada, United States Of America, 31 May - 03 June 2016, pp.1862-1866 identifier identifier

  • Publication Type: Conference Paper / Full Text
  • Doi Number: 10.1109/ectc.2016.389
  • City: Nevada
  • Country: United States Of America
  • Page Numbers: pp.1862-1866
  • Istanbul Technical University Affiliated: Yes


A novel process employing a mixture of Su-8 negative photoresist and surfactant coated magnetic nanoparticles is demonstrated. Magnetic nanoparticles increase the permeability of Su-8. Coplanar waveguide samples are fabricated by using of nanoparticles with associated fabrication process and characterized. Magnetic composite material results demonstrated a higher propagation constant without any visible eddy current losses that are generally associated with high permeability materials.