Changes in materials properties of low k interlayer dielectiric polymers induced by exposure to plasma

Trabzon L., Awadelkarim O.

MICROELECTRONIC ENGINEERING, vol.65, no.4, pp.463-477, 2003 (SCI-Expanded)

  • Publication Type: Article / Article
  • Volume: 65 Issue: 4
  • Publication Date: 2003
  • Journal Name: MICROELECTRONIC ENGINEERING
  • Journal Indexes: Science Citation Index Expanded (SCI-EXPANDED), Scopus
  • Page Numbers: pp.463-477
  • Istanbul Technical University Affiliated: Yes