Changes in materials properties of low k interlayer dielectiric polymers induced by exposure to plasma

Trabzon L. , Awadelkarim O.

MICROELECTRONIC ENGINEERING, vol.65, no.4, pp.463-477, 2003 (Journal Indexed in SCI Expanded)

  • Publication Type: Article / Article
  • Volume: 65 Issue: 4
  • Publication Date: 2003
  • Title of Journal : MICROELECTRONIC ENGINEERING
  • Page Numbers: pp.463-477