MEMS bimaterial IR sensor array with AC-coupled optical readout

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Adiyan U., Civitci F., Ferhanoğlu O., Torun H., Urey H.

International Conference on Optical MEMS and Nanophotonics, OMN 2015, Jerusalem, Israel, 2 - 05 August 2015

• Publication Type: Conference Paper / Full Text
• Doi Number: 10.1109/omn.2015.7288834
• City: Jerusalem
• Country: Israel
• Istanbul Technical University Affiliated: Yes