Two-wavelength grating interferometry for MEMS sensors


Ferhanoglu O. , Toy M. F. , Urey H.

IEEE PHOTONICS TECHNOLOGY LETTERS, cilt.19, ss.1895-1897, 2007 (SCI İndekslerine Giren Dergi) identifier identifier

  • Cilt numarası: 19
  • Basım Tarihi: 2007
  • Doi Numarası: 10.1109/lpt.2007.908450
  • Dergi Adı: IEEE PHOTONICS TECHNOLOGY LETTERS
  • Sayfa Sayıları: ss.1895-1897

Özet

Diffraction gratings integrated with micro-electro-mechanical-systems (MEMS) offer shot noise limited subnanometer displacement detection sensitivities but are limited in detection range for mechanical transducers. A two-wavelength readout method is developed that maintains high sensitivity while increasing the detection range, which is demonstrated using a MEMS spectrometer with integrated diffraction grating. The two-laser illumination extended the detection range from 105 nm to 1.7 mu m assuming the readout sensitivity is maintained at >50% of the maximum sensitivity.