Two-wavelength grating interferometry for MEMS sensors


Ferhanoglu O. , Toy M. F. , Urey H.

IEEE PHOTONICS TECHNOLOGY LETTERS, vol.19, pp.1895-1897, 2007 (Journal Indexed in SCI) identifier identifier

  • Publication Type: Article / Article
  • Volume: 19
  • Publication Date: 2007
  • Doi Number: 10.1109/lpt.2007.908450
  • Title of Journal : IEEE PHOTONICS TECHNOLOGY LETTERS
  • Page Numbers: pp.1895-1897

Abstract

Diffraction gratings integrated with micro-electro-mechanical-systems (MEMS) offer shot noise limited subnanometer displacement detection sensitivities but are limited in detection range for mechanical transducers. A two-wavelength readout method is developed that maintains high sensitivity while increasing the detection range, which is demonstrated using a MEMS spectrometer with integrated diffraction grating. The two-laser illumination extended the detection range from 105 nm to 1.7 mu m assuming the readout sensitivity is maintained at >50% of the maximum sensitivity.