Structural and Optical Properties of Silicon Carbonitride Thin Films Deposited by Reactive DC Magnetron Sputtering

Özkan Zayim E., Ağırseven O., Tavşanoğlu T., Yücel O.

TMS 2012 Supplemental proceedings: Vol 1 Materials Processing and Interfaces, Orlando, United States Of America, 11 - 15 March 2012, pp.421-427

  • Publication Type: Conference Paper / Full Text
  • City: Orlando
  • Country: United States Of America
  • Page Numbers: pp.421-427
  • Istanbul Technical University Affiliated: Yes