PROCESSING OF DIFFRACTION PATTERNS SCANNED WITH A PHOTODIODE ARRAY INFLUENCE OF THE OPTICAL TRANSFER-FUNCTION OF DIODES ON LINEWIDTH MEASUREMENTS | AVESİS

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PROCESSING OF DIFFRACTION PATTERNS SCANNED WITH A PHOTODIODE ARRAY INFLUENCE OF THE OPTICAL TRANSFER-FUNCTION OF DIODES ON LINEWIDTH MEASUREMENTS

OZKUL C. , LEDUC A., ALLANO D., ABDELGHANIIDRISSI M.

CONF ON IMAGE PROCESSING 3, Paris, France, 27 - 28 April 1989, vol.1135, pp.131-140

Publication Type: Conference Paper / Full Text
Volume: 1135
City: Paris
Country: France
Page Numbers: pp.131-140