PROCESSING OF DIFFRACTION PATTERNS SCANNED WITH A PHOTODIODE ARRAY INFLUENCE OF THE OPTICAL TRANSFER-FUNCTION OF DIODES ON LINEWIDTH MEASUREMENTS


OZKUL C. , LEDUC A., ALLANO D., ABDELGHANIIDRISSI M.

CONF ON IMAGE PROCESSING 3, Paris, France, 27 - 28 April 1989, vol.1135, pp.131-140 identifier

  • Publication Type: Conference Paper / Full Text
  • Volume: 1135
  • City: Paris
  • Country: France
  • Page Numbers: pp.131-140