Damage to sub half micron metal oxide silicon field effect transistor from plasma processing of low k polymer interlayer dielectrics


Trabzon L. , Awadelkarim O.

SEMICONDUCTOR SCIENCE AND TECHNOLOGY, vol.0, 2000 (Journal Indexed in SCI)

  • Publication Type: Article / Article
  • Volume: 0
  • Publication Date: 2000
  • Title of Journal : SEMICONDUCTOR SCIENCE AND TECHNOLOGY