Damage to sub half micron metal oxide silicon field effect transistor from plasma processing of low k polymer interlayer dielectrics


Trabzon L. , Awadelkarim O.

SEMICONDUCTOR SCIENCE AND TECHNOLOGY, cilt.0, 2000 (SCI İndekslerine Giren Dergi)

  • Yayın Türü: Makale / Tam Makale
  • Cilt numarası: 0
  • Basım Tarihi: 2000
  • Dergi Adı: SEMICONDUCTOR SCIENCE AND TECHNOLOGY