Optical, Electrical and Structural properties of SiC Thin Films Deposited by reactive DC Magnetron Sputtering

TAVŞANOĞLU T., ÖZKAN ZAYİM E., Ağırseven O., YILDIRIM S., YÜCEL O.

BRAMAT 2017, Brasov, Romania, 9 - 11 March 2017, pp.156

  • Publication Type: Conference Paper / Summary Text
  • City: Brasov
  • Country: Romania
  • Page Numbers: pp.156
  • Istanbul Technical University Affiliated: Yes