Investigation of warpage behavior of single crystal silicon on a silicon -adhesive -ceramicintegrated structure at cryogenic temperatures


Can Baloǧlu E., Özyurt T. O. , DURSUNKAYA Z.

IMAPS 12th International Conference and Exhibition on Device Packaging, Arizona, United States Of America, 14 - 17 March 2016 identifier

  • Publication Type: Conference Paper / Full Text
  • Volume:
  • City: Arizona
  • Country: United States Of America