Herein, we report the fabrication and characterization of Camphor Sulfonic Acid (CSA) doped Poly(3-hexylthiophene) (P3HT) nanofilms prepared at different substrate temperature on glass by simple wire bar coating method. Spectroscopic, optic, structural and electrical properties of the prepared nanofilms were characterized by atomic force microscopy (AFM), UV-Visible spectroscopy, fluorescence spectroscopy, X-ray diffraction, NKD spectroscopy, SEM and DC electrical measurements. The detailed electrical characterizations revealed that the conductivity of the P3HT nanofilms increased when the films are doped with CSA and the conductivity increased from 5 x 89x10(-5) S/cm to 1 x 39x10(-4) S/cm for 40 degrees C preparation temperature. Thus, it was confirmed that the substrate temperature plays an important role on the film structure and spectroscopic properties. Additionally CSA-doping changes the optical properties, especially when the films prepared at 40 degrees C.