SIMULTANEOUS TWO-WAVELENGTH READOUT FOR THER1VIO-MECHANICAL MEMS DETECTORS


Adiyan U., Civitci F., Erarslan R. B. , Ferhanoğlu O. , TORUN H., Urey H.

International Conference on Optical MEMS and Nanophotonics (OMN), Glasgow, England, 17 - 21 August 2014, pp.169-170 identifier

  • Publication Type: Conference Paper / Full Text
  • Volume:
  • City: Glasgow
  • Country: England
  • Page Numbers: pp.169-170

Abstract

We proposed a novel two-wavelength optical readout for grating based thenno-mechanical MEMS arrays by using two color LEDS butt-coupled to a multi-mode fiber, which provides spatial auto-registration of two different color images on a single camera. The -1st diffraction orders of the different colors are simultaneously monitored with different channels (R and G) of the RGB camera. The sensitivity of the MEMS array is improved by using the channel data with higher sensitivity for each MEMS detector under a thermal load.