Fault Detection Considerations in Silicon Based MEMS Resonators by Observing Changes in Dynamic Behaviour


İkizoğlu S. , Akyol M.

BALKAN JOURNAL OF ELECTRİCAL AND COMPUTER ENGİNEERİNG, no.2, pp.34-38, 2014 (Refereed Journals of Other Institutions)

  • Publication Type: Article / Article
  • Publication Date: 2014
  • Title of Journal : BALKAN JOURNAL OF ELECTRİCAL AND COMPUTER ENGİNEERİNG
  • Page Numbers: pp.34-38