ANISOTROPIC ETCHING OF SILICON WITH ULTRASONIC EFFECT

---

Copy For Citation

KUNTMAN A.

JOURNAL OF MATERIALS SCIENCE LETTERS, vol.11, no.19, pp.1274-1275, 1992 (Journal Indexed in SCI)

• Publication Type: Article / Article
• Volume: 11 Issue: 19
• Publication Date: 1992
• Doi Number: 10.1007/bf00742176
• Title of Journal : JOURNAL OF MATERIALS SCIENCE LETTERS
• Page Numbers: pp.1274-1275