ANISOTROPIC ETCHING OF SILICON WITH ULTRASONIC EFFECT | AVESİS

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ANISOTROPIC ETCHING OF SILICON WITH ULTRASONIC EFFECT

JOURNAL OF MATERIALS SCIENCE LETTERS, vol.11, no.19, pp.1274-1275, 1992 (Journal Indexed in SCI)

Publication Type: Article / Article
Volume: 11 Issue: 19
Publication Date: 1992
Doi Number: 10.1007/bf00742176
Title of Journal : JOURNAL OF MATERIALS SCIENCE LETTERS
Page Numbers: pp.1274-1275