ANISOTROPIC ETCHING OF SILICON WITH ULTRASONIC EFFECT


KUNTMAN A.

JOURNAL OF MATERIALS SCIENCE LETTERS, vol.11, no.19, pp.1274-1275, 1992 (Journal Indexed in SCI) identifier identifier

  • Publication Type: Article / Article
  • Volume: 11 Issue: 19
  • Publication Date: 1992
  • Doi Number: 10.1007/bf00742176
  • Title of Journal : JOURNAL OF MATERIALS SCIENCE LETTERS
  • Page Numbers: pp.1274-1275